11/24/2011	1:19:06 PM	Main Vac valve closed
11/24/2011	1:21:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	1:21:29 PM	Recipe started at 1:21 PM
11/24/2011	1:21:29 PM	Helium valve closed
11/24/2011	1:21:29 PM	H2 valve closed
11/24/2011	1:21:29 PM	BCl3 valve closed
11/24/2011	1:21:29 PM	PH3 valve closed
11/24/2011	1:21:29 PM	SiCl4 pre valve closed
11/24/2011	1:21:29 PM	SiCl4 post valve closed
11/24/2011	1:21:29 PM	Main Vac valve closed
11/24/2011	1:21:29 PM	Bubbler valve closed
11/24/2011	1:21:29 PM	Bypass valve opened
11/24/2011	1:21:29 PM	Helium MFC set to  0.000000
11/24/2011	1:21:29 PM	H2 MFC set to  0.000000
11/24/2011	1:21:29 PM	BCl3 MFC set to  0.000000
11/24/2011	1:21:29 PM	PHl3 MFC set to  0.000000
11/24/2011	1:21:29 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:21:29 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	1:21:30 PM	Tube furnace set to 0
11/24/2011	1:23:18 PM	Helium valve closed
11/24/2011	1:23:18 PM	H2 valve closed
11/24/2011	1:23:18 PM	BCl3 valve closed
11/24/2011	1:23:18 PM	PH3 valve closed
11/24/2011	1:23:18 PM	SiCl4 pre valve closed
11/24/2011	1:23:18 PM	SiCl4 post valve closed
11/24/2011	1:23:18 PM	Main Vac valve closed
11/24/2011	1:23:18 PM	Bubbler valve closed
11/24/2011	1:23:18 PM	Bypass valve opened
11/24/2011	1:23:18 PM	Helium MFC set to  0.000000
11/24/2011	1:23:18 PM	H2 MFC set to  0.000000
11/24/2011	1:23:18 PM	BCl3 MFC set to  0.000000
11/24/2011	1:23:18 PM	PHl3 MFC set to  0.000000
11/24/2011	1:23:18 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:23:18 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	1:23:18 PM	Tube furnace set to 0
11/24/2011	1:23:33 PM	Helium valve closed
11/24/2011	1:23:33 PM	H2 valve closed
11/24/2011	1:23:33 PM	BCl3 valve closed
11/24/2011	1:23:33 PM	PH3 valve closed
11/24/2011	1:23:33 PM	SiCl4 pre valve closed
11/24/2011	1:23:33 PM	SiCl4 post valve closed
11/24/2011	1:23:33 PM	Bypass valve closed
11/24/2011	1:23:33 PM	Bubbler valve closed
11/24/2011	1:23:33 PM	Main Vac valve opened
11/24/2011	1:23:33 PM	Helium MFC set to  0.000000
11/24/2011	1:23:33 PM	H2 MFC set to  0.000000
11/24/2011	1:23:33 PM	BCl3 MFC set to  0.000000
11/24/2011	1:23:33 PM	PHl3 MFC set to  0.000000
11/24/2011	1:23:33 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:23:33 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	1:23:33 PM	Tube furnace set to 0
11/24/2011	1:23:34 PM	Run finished at 1:23 PM
11/24/2011	1:23:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	1:37:44 PM	Main Vac valve closed
11/24/2011	1:40:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	1:40:06 PM	Recipe started at 1:40 PM
11/24/2011	1:40:06 PM	Helium valve closed
11/24/2011	1:40:06 PM	H2 valve closed
11/24/2011	1:40:06 PM	BCl3 valve closed
11/24/2011	1:40:06 PM	PH3 valve closed
11/24/2011	1:40:06 PM	SiCl4 pre valve closed
11/24/2011	1:40:06 PM	SiCl4 post valve closed
11/24/2011	1:40:06 PM	Main Vac valve closed
11/24/2011	1:40:06 PM	Bubbler valve closed
11/24/2011	1:40:06 PM	Bypass valve opened
11/24/2011	1:40:06 PM	Helium MFC set to  0.000000
11/24/2011	1:40:06 PM	H2 MFC set to  0.000000
11/24/2011	1:40:06 PM	BCl3 MFC set to  0.000000
11/24/2011	1:40:06 PM	PHl3 MFC set to  0.000000
11/24/2011	1:40:06 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:40:06 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	1:40:06 PM	Tube furnace set to 0
11/24/2011	1:42:06 PM	Helium valve closed
11/24/2011	1:42:06 PM	H2 valve closed
11/24/2011	1:42:06 PM	BCl3 valve closed
11/24/2011	1:42:06 PM	PH3 valve closed
11/24/2011	1:42:06 PM	SiCl4 pre valve closed
11/24/2011	1:42:06 PM	SiCl4 post valve closed
11/24/2011	1:42:06 PM	Main Vac valve closed
11/24/2011	1:42:06 PM	Bubbler valve closed
11/24/2011	1:42:06 PM	Bypass valve opened
11/24/2011	1:42:06 PM	Helium MFC set to  0.000000
11/24/2011	1:42:06 PM	H2 MFC set to  0.000000
11/24/2011	1:42:06 PM	BCl3 MFC set to  0.000000
11/24/2011	1:42:06 PM	PHl3 MFC set to  0.000000
11/24/2011	1:42:06 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:42:06 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	1:42:06 PM	Tube furnace set to 0
11/24/2011	1:42:18 PM	Helium valve closed
11/24/2011	1:42:18 PM	H2 valve closed
11/24/2011	1:42:18 PM	BCl3 valve closed
11/24/2011	1:42:18 PM	PH3 valve closed
11/24/2011	1:42:18 PM	SiCl4 pre valve closed
11/24/2011	1:42:18 PM	SiCl4 post valve closed
11/24/2011	1:42:18 PM	Bypass valve closed
11/24/2011	1:42:18 PM	Bubbler valve closed
11/24/2011	1:42:18 PM	Main Vac valve opened
11/24/2011	1:42:18 PM	Helium MFC set to  0.000000
11/24/2011	1:42:18 PM	H2 MFC set to  0.000000
11/24/2011	1:42:18 PM	BCl3 MFC set to  0.000000
11/24/2011	1:42:18 PM	PHl3 MFC set to  0.000000
11/24/2011	1:42:18 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:42:18 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	1:42:19 PM	Tube furnace set to 0
11/24/2011	1:42:20 PM	Run finished at 1:42 PM
11/24/2011	1:42:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	1:43:35 PM	Main Vac valve closed
11/24/2011	1:43:39 PM	Helium MFC set to  500.000000
11/24/2011	1:43:39 PM	Helium valve opened
11/24/2011	1:43:47 PM	Helium valve closed
11/24/2011	1:43:48 PM	Bypass valve opened
11/24/2011	1:46:00 PM	Bypass valve closed
11/24/2011	1:46:01 PM	Main Vac valve opened
11/24/2011	1:52:33 PM	Main Vac valve closed
11/24/2011	1:52:35 PM	Helium valve opened
11/24/2011	1:53:56 PM	Helium valve closed
11/24/2011	1:53:56 PM	H2 valve closed
11/24/2011	1:53:56 PM	BCl3 valve closed
11/24/2011	1:53:56 PM	PH3 valve closed
11/24/2011	1:53:56 PM	SiCl4 pre valve closed
11/24/2011	1:53:56 PM	SiCl4 post valve closed
11/24/2011	1:53:56 PM	Main Vac valve closed
11/24/2011	1:53:56 PM	Bubbler valve closed
11/24/2011	1:53:56 PM	Bypass valve closed
11/24/2011	1:53:56 PM	Helium MFC set to  0.000000
11/24/2011	1:53:56 PM	H2 MFC set to  0.000000
11/24/2011	1:53:56 PM	BCl3 MFC set to  0.000000
11/24/2011	1:53:56 PM	PHl3 MFC set to  0.000000
11/24/2011	1:53:56 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:53:56 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:53:56 PM	Tube furnace set to 0
11/24/2011	1:53:56 PM	Baratron reads 902.609148 Torr.  Emergency exit.
11/24/2011	1:54:29 PM	Program exited cleanly
11/24/2011	1:54:31 PM	Helium valve closed
11/24/2011	1:54:31 PM	H2 valve closed
11/24/2011	1:54:31 PM	BCl3 valve closed
11/24/2011	1:54:31 PM	PH3 valve closed
11/24/2011	1:54:31 PM	SiCl4 pre valve closed
11/24/2011	1:54:31 PM	SiCl4 post valve closed
11/24/2011	1:54:31 PM	Main Vac valve closed
11/24/2011	1:54:31 PM	Bypass valve closed
11/24/2011	1:54:31 PM	Bubbler valve closed
11/24/2011	1:54:31 PM	Helium MFC set to  0.000000
11/24/2011	1:54:31 PM	H2 MFC set to  0.000000
11/24/2011	1:54:31 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:31 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:31 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:31 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:31 PM	Tube furnace set to 0
11/24/2011	1:54:32 PM	Helium valve closed
11/24/2011	1:54:32 PM	H2 valve closed
11/24/2011	1:54:32 PM	BCl3 valve closed
11/24/2011	1:54:32 PM	PH3 valve closed
11/24/2011	1:54:32 PM	SiCl4 pre valve closed
11/24/2011	1:54:32 PM	SiCl4 post valve closed
11/24/2011	1:54:32 PM	Main Vac valve closed
11/24/2011	1:54:32 PM	Bubbler valve closed
11/24/2011	1:54:32 PM	Bypass valve closed
11/24/2011	1:54:32 PM	Helium MFC set to  0.000000
11/24/2011	1:54:32 PM	H2 MFC set to  0.000000
11/24/2011	1:54:32 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:32 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:32 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:32 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:32 PM	Tube furnace set to 0
11/24/2011	1:54:32 PM	Baratron reads 902.609148 Torr.  Emergency exit.
11/24/2011	1:54:33 PM	Program exited cleanly
11/24/2011	1:54:35 PM	Helium valve closed
11/24/2011	1:54:35 PM	H2 valve closed
11/24/2011	1:54:35 PM	BCl3 valve closed
11/24/2011	1:54:35 PM	PH3 valve closed
11/24/2011	1:54:35 PM	SiCl4 pre valve closed
11/24/2011	1:54:35 PM	SiCl4 post valve closed
11/24/2011	1:54:35 PM	Main Vac valve closed
11/24/2011	1:54:35 PM	Bypass valve closed
11/24/2011	1:54:35 PM	Bubbler valve closed
11/24/2011	1:54:35 PM	Helium MFC set to  0.000000
11/24/2011	1:54:35 PM	H2 MFC set to  0.000000
11/24/2011	1:54:35 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:35 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:35 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:35 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:35 PM	Tube furnace set to 0
11/24/2011	1:54:35 PM	Helium valve closed
11/24/2011	1:54:35 PM	H2 valve closed
11/24/2011	1:54:35 PM	BCl3 valve closed
11/24/2011	1:54:35 PM	PH3 valve closed
11/24/2011	1:54:35 PM	SiCl4 pre valve closed
11/24/2011	1:54:35 PM	SiCl4 post valve closed
11/24/2011	1:54:35 PM	Main Vac valve closed
11/24/2011	1:54:35 PM	Bubbler valve closed
11/24/2011	1:54:35 PM	Bypass valve closed
11/24/2011	1:54:35 PM	Helium MFC set to  0.000000
11/24/2011	1:54:35 PM	H2 MFC set to  0.000000
11/24/2011	1:54:35 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:35 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:35 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:35 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:35 PM	Tube furnace set to 0
11/24/2011	1:54:35 PM	Baratron reads 902.609148 Torr.  Emergency exit.
11/24/2011	1:54:36 PM	Program exited cleanly
11/24/2011	1:54:39 PM	Helium valve closed
11/24/2011	1:54:39 PM	H2 valve closed
11/24/2011	1:54:39 PM	BCl3 valve closed
11/24/2011	1:54:39 PM	PH3 valve closed
11/24/2011	1:54:39 PM	SiCl4 pre valve closed
11/24/2011	1:54:39 PM	SiCl4 post valve closed
11/24/2011	1:54:39 PM	Main Vac valve closed
11/24/2011	1:54:39 PM	Bypass valve closed
11/24/2011	1:54:39 PM	Bubbler valve closed
11/24/2011	1:54:39 PM	Helium MFC set to  0.000000
11/24/2011	1:54:39 PM	H2 MFC set to  0.000000
11/24/2011	1:54:39 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:39 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:39 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:39 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:39 PM	Tube furnace set to 0
11/24/2011	1:54:39 PM	Helium valve closed
11/24/2011	1:54:39 PM	H2 valve closed
11/24/2011	1:54:39 PM	BCl3 valve closed
11/24/2011	1:54:39 PM	PH3 valve closed
11/24/2011	1:54:39 PM	SiCl4 pre valve closed
11/24/2011	1:54:39 PM	SiCl4 post valve closed
11/24/2011	1:54:39 PM	Main Vac valve closed
11/24/2011	1:54:39 PM	Bubbler valve closed
11/24/2011	1:54:39 PM	Bypass valve closed
11/24/2011	1:54:39 PM	Helium MFC set to  0.000000
11/24/2011	1:54:39 PM	H2 MFC set to  0.000000
11/24/2011	1:54:39 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:39 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:39 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:39 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:40 PM	Tube furnace set to 0
11/24/2011	1:54:40 PM	Baratron reads 902.609148 Torr.  Emergency exit.
11/24/2011	1:54:40 PM	Program exited cleanly
11/24/2011	1:54:42 PM	Helium valve closed
11/24/2011	1:54:42 PM	H2 valve closed
11/24/2011	1:54:42 PM	BCl3 valve closed
11/24/2011	1:54:42 PM	PH3 valve closed
11/24/2011	1:54:42 PM	SiCl4 pre valve closed
11/24/2011	1:54:42 PM	SiCl4 post valve closed
11/24/2011	1:54:42 PM	Main Vac valve closed
11/24/2011	1:54:42 PM	Bypass valve closed
11/24/2011	1:54:42 PM	Bubbler valve closed
11/24/2011	1:54:42 PM	Helium MFC set to  0.000000
11/24/2011	1:54:42 PM	H2 MFC set to  0.000000
11/24/2011	1:54:42 PM	BCl3 MFC set to  0.000000
11/24/2011	1:54:42 PM	PHl3 MFC set to  0.000000
11/24/2011	1:54:42 PM	SiCl4 MFC set to  0.000000
11/24/2011	1:54:42 PM	Bypass solenoid MFC set to  760.000000
11/24/2011	1:54:42 PM	Tube furnace set to 0
11/24/2011	1:54:42 PM	Bypass valve opened
11/24/2011	1:56:14 PM	Bypass valve closed
11/24/2011	1:56:15 PM	Main Vac valve opened
11/24/2011	2:47:46 PM	Main Vac valve closed
11/24/2011	2:48:13 PM	Main Vac valve opened
11/24/2011	2:55:28 PM	Recipe started at 2:55 PM
11/24/2011	2:55:28 PM	Helium valve closed
11/24/2011	2:55:28 PM	H2 valve closed
11/24/2011	2:55:28 PM	BCl3 valve closed
11/24/2011	2:55:28 PM	PH3 valve closed
11/24/2011	2:55:28 PM	SiCl4 pre valve closed
11/24/2011	2:55:28 PM	SiCl4 post valve closed
11/24/2011	2:55:28 PM	Main Vac valve closed
11/24/2011	2:55:28 PM	Bypass valve closed
11/24/2011	2:55:28 PM	Bubbler valve closed
11/24/2011	2:55:28 PM	Helium MFC set to  0.000000
11/24/2011	2:55:28 PM	H2 MFC set to  0.000000
11/24/2011	2:55:28 PM	BCl3 MFC set to  0.000000
11/24/2011	2:55:28 PM	PHl3 MFC set to  0.000000
11/24/2011	2:55:28 PM	SiCl4 MFC set to  0.000000
11/24/2011	2:55:28 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	2:55:28 PM	Tube furnace set to 0
11/24/2011	2:55:31 PM	Helium valve closed
11/24/2011	2:55:31 PM	BCl3 valve closed
11/24/2011	2:55:31 PM	PH3 valve closed
11/24/2011	2:55:31 PM	SiCl4 pre valve closed
11/24/2011	2:55:31 PM	SiCl4 post valve closed
11/24/2011	2:55:31 PM	Main Vac valve closed
11/24/2011	2:55:31 PM	Bypass valve closed
11/24/2011	2:55:31 PM	Bubbler valve closed
11/24/2011	2:55:31 PM	H2 valve opened
11/24/2011	2:55:31 PM	Helium MFC set to  0.000000
11/24/2011	2:55:31 PM	H2 MFC set to  500.000000
11/24/2011	2:55:31 PM	BCl3 MFC set to  0.000000
11/24/2011	2:55:31 PM	PHl3 MFC set to  0.000000
11/24/2011	2:55:31 PM	SiCl4 MFC set to  0.000000
11/24/2011	2:55:31 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	2:55:31 PM	Tube furnace set to 0
11/24/2011	2:56:40 PM	Helium valve closed
11/24/2011	2:56:40 PM	BCl3 valve closed
11/24/2011	2:56:40 PM	PH3 valve closed
11/24/2011	2:56:40 PM	SiCl4 pre valve closed
11/24/2011	2:56:40 PM	SiCl4 post valve closed
11/24/2011	2:56:40 PM	Main Vac valve closed
11/24/2011	2:56:40 PM	Bypass valve closed
11/24/2011	2:56:40 PM	H2 valve opened
11/24/2011	2:56:40 PM	Bubbler valve opened
11/24/2011	2:56:40 PM	Helium MFC set to  0.000000
11/24/2011	2:56:40 PM	H2 MFC set to  500.000000
11/24/2011	2:56:40 PM	BCl3 MFC set to  0.000000
11/24/2011	2:56:40 PM	PHl3 MFC set to  0.000000
11/24/2011	2:56:40 PM	SiCl4 MFC set to  0.000000
11/24/2011	2:56:40 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	2:56:40 PM	Tube furnace set to 0
11/24/2011	2:56:41 PM	Helium valve closed
11/24/2011	2:56:41 PM	BCl3 valve closed
11/24/2011	2:56:41 PM	PH3 valve closed
11/24/2011	2:56:41 PM	SiCl4 pre valve closed
11/24/2011	2:56:41 PM	SiCl4 post valve closed
11/24/2011	2:56:41 PM	Main Vac valve closed
11/24/2011	2:56:41 PM	Bypass valve closed
11/24/2011	2:56:41 PM	H2 valve opened
11/24/2011	2:56:41 PM	Bubbler valve opened
11/24/2011	2:56:41 PM	Helium MFC set to  0.000000
11/24/2011	2:56:41 PM	H2 MFC set to  500.000000
11/24/2011	2:56:41 PM	BCl3 MFC set to  0.000000
11/24/2011	2:56:41 PM	PHl3 MFC set to  0.000000
11/24/2011	2:56:41 PM	SiCl4 MFC set to  0.000000
11/24/2011	2:56:41 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	2:56:41 PM	Tube furnace set to 1000
11/24/2011	3:19:41 PM	Helium valve closed
11/24/2011	3:19:41 PM	PH3 valve closed
11/24/2011	3:19:41 PM	Main Vac valve closed
11/24/2011	3:19:41 PM	Bypass valve closed
11/24/2011	3:19:41 PM	H2 valve opened
11/24/2011	3:19:41 PM	BCl3 valve opened
11/24/2011	3:19:41 PM	SiCl4 pre valve opened
11/24/2011	3:19:41 PM	SiCl4 post valve opened
11/24/2011	3:19:41 PM	Bubbler valve opened
11/24/2011	3:19:41 PM	Helium MFC set to  0.000000
11/24/2011	3:19:41 PM	H2 MFC set to  500.000000
11/24/2011	3:19:41 PM	BCl3 MFC set to  20.000000
11/24/2011	3:19:41 PM	PHl3 MFC set to  0.000000
11/24/2011	3:19:41 PM	SiCl4 MFC set to  42.000000
11/24/2011	3:19:41 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	3:19:41 PM	Tube furnace set to 1000
11/24/2011	3:22:41 PM	Helium valve closed
11/24/2011	3:22:41 PM	BCl3 valve closed
11/24/2011	3:22:41 PM	PH3 valve closed
11/24/2011	3:22:41 PM	SiCl4 pre valve closed
11/24/2011	3:22:41 PM	SiCl4 post valve closed
11/24/2011	3:22:41 PM	Main Vac valve closed
11/24/2011	3:22:41 PM	Bypass valve closed
11/24/2011	3:22:41 PM	H2 valve opened
11/24/2011	3:22:41 PM	Bubbler valve opened
11/24/2011	3:22:41 PM	Helium MFC set to  0.000000
11/24/2011	3:22:41 PM	H2 MFC set to  500.000000
11/24/2011	3:22:41 PM	BCl3 MFC set to  0.000000
11/24/2011	3:22:41 PM	PHl3 MFC set to  0.000000
11/24/2011	3:22:41 PM	SiCl4 MFC set to  0.000000
11/24/2011	3:22:41 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	3:22:41 PM	Tube furnace set to 1000
11/24/2011	3:24:41 PM	Helium valve closed
11/24/2011	3:24:41 PM	BCl3 valve closed
11/24/2011	3:24:41 PM	PH3 valve closed
11/24/2011	3:24:42 PM	Main Vac valve closed
11/24/2011	3:24:42 PM	Bypass valve closed
11/24/2011	3:24:42 PM	H2 valve opened
11/24/2011	3:24:42 PM	SiCl4 pre valve opened
11/24/2011	3:24:42 PM	SiCl4 post valve opened
11/24/2011	3:24:42 PM	Bubbler valve opened
11/24/2011	3:24:42 PM	Helium MFC set to  0.000000
11/24/2011	3:24:42 PM	H2 MFC set to  500.000000
11/24/2011	3:24:42 PM	BCl3 MFC set to  0.000000
11/24/2011	3:24:42 PM	PHl3 MFC set to  0.000000
11/24/2011	3:24:42 PM	SiCl4 MFC set to  42.000000
11/24/2011	3:24:42 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	3:24:42 PM	Tube furnace set to 1000
11/24/2011	3:41:42 PM	Helium valve closed
11/24/2011	3:41:42 PM	BCl3 valve closed
11/24/2011	3:41:42 PM	PH3 valve closed
11/24/2011	3:41:42 PM	SiCl4 pre valve closed
11/24/2011	3:41:42 PM	SiCl4 post valve closed
11/24/2011	3:41:42 PM	Main Vac valve closed
11/24/2011	3:41:42 PM	Bypass valve closed
11/24/2011	3:41:42 PM	H2 valve opened
11/24/2011	3:41:42 PM	Bubbler valve opened
11/24/2011	3:41:42 PM	Helium MFC set to  0.000000
11/24/2011	3:41:42 PM	H2 MFC set to  500.000000
11/24/2011	3:41:42 PM	BCl3 MFC set to  0.000000
11/24/2011	3:41:42 PM	PHl3 MFC set to  0.000000
11/24/2011	3:41:42 PM	SiCl4 MFC set to  0.000000
11/24/2011	3:41:42 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	3:41:42 PM	Tube furnace set to 950
11/24/2011	3:46:42 PM	Helium valve closed
11/24/2011	3:46:42 PM	BCl3 valve closed
11/24/2011	3:46:42 PM	PH3 valve closed
11/24/2011	3:46:42 PM	SiCl4 pre valve closed
11/24/2011	3:46:42 PM	SiCl4 post valve closed
11/24/2011	3:46:42 PM	Main Vac valve closed
11/24/2011	3:46:42 PM	Bypass valve closed
11/24/2011	3:46:42 PM	H2 valve opened
11/24/2011	3:46:42 PM	Bubbler valve opened
11/24/2011	3:46:42 PM	Helium MFC set to  0.000000
11/24/2011	3:46:42 PM	H2 MFC set to  500.000000
11/24/2011	3:46:42 PM	BCl3 MFC set to  0.000000
11/24/2011	3:46:42 PM	PHl3 MFC set to  0.000000
11/24/2011	3:46:42 PM	SiCl4 MFC set to  0.000000
11/24/2011	3:46:42 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	3:46:42 PM	Tube furnace set to 850
11/24/2011	3:51:42 PM	H2 valve closed
11/24/2011	3:51:42 PM	BCl3 valve closed
11/24/2011	3:51:42 PM	PH3 valve closed
11/24/2011	3:51:42 PM	SiCl4 pre valve closed
11/24/2011	3:51:42 PM	SiCl4 post valve closed
11/24/2011	3:51:42 PM	Main Vac valve closed
11/24/2011	3:51:42 PM	Bypass valve closed
11/24/2011	3:51:42 PM	Helium valve opened
11/24/2011	3:51:42 PM	Bubbler valve opened
11/24/2011	3:51:42 PM	Helium MFC set to  500.000000
11/24/2011	3:51:42 PM	H2 MFC set to  0.000000
11/24/2011	3:51:42 PM	BCl3 MFC set to  0.000000
11/24/2011	3:51:42 PM	PHl3 MFC set to  0.000000
11/24/2011	3:51:42 PM	SiCl4 MFC set to  0.000000
11/24/2011	3:51:42 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	3:51:42 PM	Tube furnace set to 0
11/24/2011	4:31:42 PM	Helium valve closed
11/24/2011	4:31:42 PM	H2 valve closed
11/24/2011	4:31:42 PM	BCl3 valve closed
11/24/2011	4:31:42 PM	PH3 valve closed
11/24/2011	4:31:42 PM	SiCl4 pre valve closed
11/24/2011	4:31:42 PM	SiCl4 post valve closed
11/24/2011	4:31:42 PM	Main Vac valve closed
11/24/2011	4:31:42 PM	Bypass valve closed
11/24/2011	4:31:42 PM	Bubbler valve closed
11/24/2011	4:31:42 PM	Helium MFC set to  0.000000
11/24/2011	4:31:42 PM	H2 MFC set to  0.000000
11/24/2011	4:31:42 PM	BCl3 MFC set to  0.000000
11/24/2011	4:31:42 PM	PHl3 MFC set to  0.000000
11/24/2011	4:31:42 PM	SiCl4 MFC set to  0.000000
11/24/2011	4:31:42 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	4:31:43 PM	Tube furnace set to 0
11/24/2011	4:31:44 PM	Run finished at 4:31 PM
11/24/2011	5:01:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	5:01:07 PM	Recipe started at 5:01 PM
11/24/2011	5:01:07 PM	Helium valve closed
11/24/2011	5:01:07 PM	H2 valve closed
11/24/2011	5:01:07 PM	BCl3 valve closed
11/24/2011	5:01:07 PM	PH3 valve closed
11/24/2011	5:01:07 PM	SiCl4 pre valve closed
11/24/2011	5:01:07 PM	SiCl4 post valve closed
11/24/2011	5:01:07 PM	Main Vac valve closed
11/24/2011	5:01:07 PM	Bubbler valve closed
11/24/2011	5:01:07 PM	Bypass valve opened
11/24/2011	5:01:07 PM	Helium MFC set to  0.000000
11/24/2011	5:01:07 PM	H2 MFC set to  0.000000
11/24/2011	5:01:07 PM	BCl3 MFC set to  0.000000
11/24/2011	5:01:07 PM	PHl3 MFC set to  0.000000
11/24/2011	5:01:07 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:01:07 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:01:07 PM	Tube furnace set to 0
11/24/2011	5:02:11 PM	Helium valve closed
11/24/2011	5:02:11 PM	H2 valve closed
11/24/2011	5:02:11 PM	BCl3 valve closed
11/24/2011	5:02:11 PM	PH3 valve closed
11/24/2011	5:02:11 PM	SiCl4 pre valve closed
11/24/2011	5:02:11 PM	SiCl4 post valve closed
11/24/2011	5:02:11 PM	Main Vac valve closed
11/24/2011	5:02:11 PM	Bubbler valve closed
11/24/2011	5:02:11 PM	Bypass valve opened
11/24/2011	5:02:11 PM	Helium MFC set to  0.000000
11/24/2011	5:02:11 PM	H2 MFC set to  0.000000
11/24/2011	5:02:11 PM	BCl3 MFC set to  0.000000
11/24/2011	5:02:11 PM	PHl3 MFC set to  0.000000
11/24/2011	5:02:11 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:02:11 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:02:11 PM	Tube furnace set to 0
11/24/2011	5:02:38 PM	Helium valve closed
11/24/2011	5:02:38 PM	H2 valve closed
11/24/2011	5:02:38 PM	BCl3 valve closed
11/24/2011	5:02:38 PM	PH3 valve closed
11/24/2011	5:02:38 PM	SiCl4 pre valve closed
11/24/2011	5:02:38 PM	SiCl4 post valve closed
11/24/2011	5:02:38 PM	Bypass valve closed
11/24/2011	5:02:38 PM	Bubbler valve closed
11/24/2011	5:02:38 PM	Main Vac valve opened
11/24/2011	5:02:38 PM	Helium MFC set to  0.000000
11/24/2011	5:02:38 PM	H2 MFC set to  0.000000
11/24/2011	5:02:38 PM	BCl3 MFC set to  0.000000
11/24/2011	5:02:38 PM	PHl3 MFC set to  0.000000
11/24/2011	5:02:38 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:02:38 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:02:38 PM	Tube furnace set to 0
11/24/2011	5:02:39 PM	Run finished at 5:02 PM
11/24/2011	5:02:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	5:24:26 PM	Helium MFC set to  500.000000
11/24/2011	5:24:28 PM	Main Vac valve closed
11/24/2011	5:24:29 PM	Helium valve opened
11/24/2011	5:24:57 PM	Helium valve closed
11/24/2011	5:24:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	5:24:59 PM	Recipe started at 5:24 PM
11/24/2011	5:24:59 PM	Helium valve closed
11/24/2011	5:24:59 PM	H2 valve closed
11/24/2011	5:24:59 PM	BCl3 valve closed
11/24/2011	5:24:59 PM	PH3 valve closed
11/24/2011	5:24:59 PM	SiCl4 pre valve closed
11/24/2011	5:24:59 PM	SiCl4 post valve closed
11/24/2011	5:24:59 PM	Main Vac valve closed
11/24/2011	5:24:59 PM	Bubbler valve closed
11/24/2011	5:24:59 PM	Bypass valve opened
11/24/2011	5:24:59 PM	Helium MFC set to  0.000000
11/24/2011	5:24:59 PM	H2 MFC set to  0.000000
11/24/2011	5:24:59 PM	BCl3 MFC set to  0.000000
11/24/2011	5:24:59 PM	PHl3 MFC set to  0.000000
11/24/2011	5:24:59 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:24:59 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:24:59 PM	Tube furnace set to 0
11/24/2011	5:25:51 PM	Helium valve closed
11/24/2011	5:25:51 PM	H2 valve closed
11/24/2011	5:25:51 PM	BCl3 valve closed
11/24/2011	5:25:51 PM	PH3 valve closed
11/24/2011	5:25:51 PM	SiCl4 pre valve closed
11/24/2011	5:25:51 PM	SiCl4 post valve closed
11/24/2011	5:25:51 PM	Main Vac valve closed
11/24/2011	5:25:51 PM	Bubbler valve closed
11/24/2011	5:25:51 PM	Bypass valve opened
11/24/2011	5:25:51 PM	Helium MFC set to  0.000000
11/24/2011	5:25:51 PM	H2 MFC set to  0.000000
11/24/2011	5:25:51 PM	BCl3 MFC set to  0.000000
11/24/2011	5:25:51 PM	PHl3 MFC set to  0.000000
11/24/2011	5:25:51 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:25:51 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:25:51 PM	Tube furnace set to 0
11/24/2011	5:26:40 PM	Helium valve closed
11/24/2011	5:26:40 PM	H2 valve closed
11/24/2011	5:26:40 PM	BCl3 valve closed
11/24/2011	5:26:40 PM	PH3 valve closed
11/24/2011	5:26:40 PM	SiCl4 pre valve closed
11/24/2011	5:26:40 PM	SiCl4 post valve closed
11/24/2011	5:26:40 PM	Bypass valve closed
11/24/2011	5:26:40 PM	Bubbler valve closed
11/24/2011	5:26:40 PM	Main Vac valve opened
11/24/2011	5:26:40 PM	Helium MFC set to  0.000000
11/24/2011	5:26:40 PM	H2 MFC set to  0.000000
11/24/2011	5:26:40 PM	BCl3 MFC set to  0.000000
11/24/2011	5:26:40 PM	PHl3 MFC set to  0.000000
11/24/2011	5:26:40 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:26:40 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:26:40 PM	Tube furnace set to 0
11/24/2011	5:26:41 PM	Run finished at 5:26 PM
11/24/2011	5:26:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	5:50:09 PM	Main Vac valve closed
11/24/2011	5:50:22 PM	Main Vac valve opened
11/24/2011	5:50:31 PM	Helium MFC set to  500.000000
11/24/2011	5:50:32 PM	Main Vac valve closed
11/24/2011	5:50:33 PM	Helium valve opened
11/24/2011	5:51:14 PM	Helium valve closed
11/24/2011	5:51:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	5:51:15 PM	Recipe started at 5:51 PM
11/24/2011	5:51:15 PM	Helium valve closed
11/24/2011	5:51:15 PM	H2 valve closed
11/24/2011	5:51:15 PM	BCl3 valve closed
11/24/2011	5:51:15 PM	PH3 valve closed
11/24/2011	5:51:15 PM	SiCl4 pre valve closed
11/24/2011	5:51:15 PM	SiCl4 post valve closed
11/24/2011	5:51:15 PM	Main Vac valve closed
11/24/2011	5:51:15 PM	Bubbler valve closed
11/24/2011	5:51:15 PM	Bypass valve opened
11/24/2011	5:51:15 PM	Helium MFC set to  0.000000
11/24/2011	5:51:15 PM	H2 MFC set to  0.000000
11/24/2011	5:51:15 PM	BCl3 MFC set to  0.000000
11/24/2011	5:51:15 PM	PHl3 MFC set to  0.000000
11/24/2011	5:51:15 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:51:15 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:51:15 PM	Tube furnace set to 0
11/24/2011	5:52:08 PM	Helium valve closed
11/24/2011	5:52:08 PM	H2 valve closed
11/24/2011	5:52:08 PM	BCl3 valve closed
11/24/2011	5:52:08 PM	PH3 valve closed
11/24/2011	5:52:08 PM	SiCl4 pre valve closed
11/24/2011	5:52:08 PM	SiCl4 post valve closed
11/24/2011	5:52:08 PM	Main Vac valve closed
11/24/2011	5:52:08 PM	Bubbler valve closed
11/24/2011	5:52:08 PM	Bypass valve opened
11/24/2011	5:52:08 PM	Helium MFC set to  0.000000
11/24/2011	5:52:08 PM	H2 MFC set to  0.000000
11/24/2011	5:52:08 PM	BCl3 MFC set to  0.000000
11/24/2011	5:52:08 PM	PHl3 MFC set to  0.000000
11/24/2011	5:52:08 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:52:08 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:52:08 PM	Tube furnace set to 0
11/24/2011	5:52:28 PM	Helium valve closed
11/24/2011	5:52:28 PM	H2 valve closed
11/24/2011	5:52:28 PM	BCl3 valve closed
11/24/2011	5:52:28 PM	PH3 valve closed
11/24/2011	5:52:28 PM	SiCl4 pre valve closed
11/24/2011	5:52:28 PM	SiCl4 post valve closed
11/24/2011	5:52:28 PM	Bypass valve closed
11/24/2011	5:52:28 PM	Bubbler valve closed
11/24/2011	5:52:28 PM	Main Vac valve opened
11/24/2011	5:52:28 PM	Helium MFC set to  0.000000
11/24/2011	5:52:28 PM	H2 MFC set to  0.000000
11/24/2011	5:52:28 PM	BCl3 MFC set to  0.000000
11/24/2011	5:52:28 PM	PHl3 MFC set to  0.000000
11/24/2011	5:52:28 PM	SiCl4 MFC set to  0.000000
11/24/2011	5:52:28 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	5:52:28 PM	Tube furnace set to 0
11/24/2011	5:52:29 PM	Run finished at 5:52 PM
11/24/2011	5:52:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	6:00:23 PM	Main Vac valve closed
11/24/2011	6:00:34 PM	Main Vac valve opened
11/24/2011	6:24:23 PM	Main Vac valve closed
11/24/2011	6:24:41 PM	Main Vac valve opened
11/24/2011	6:36:37 PM	Helium MFC set to  500.000000
11/24/2011	6:36:38 PM	Main Vac valve closed
11/24/2011	6:36:39 PM	Helium valve opened
11/24/2011	6:37:26 PM	Helium valve closed
11/24/2011	6:37:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	6:37:29 PM	Recipe started at 6:37 PM
11/24/2011	6:37:29 PM	Helium valve closed
11/24/2011	6:37:29 PM	H2 valve closed
11/24/2011	6:37:29 PM	BCl3 valve closed
11/24/2011	6:37:29 PM	PH3 valve closed
11/24/2011	6:37:29 PM	SiCl4 pre valve closed
11/24/2011	6:37:29 PM	SiCl4 post valve closed
11/24/2011	6:37:29 PM	Main Vac valve closed
11/24/2011	6:37:29 PM	Bubbler valve closed
11/24/2011	6:37:29 PM	Bypass valve opened
11/24/2011	6:37:29 PM	Helium MFC set to  0.000000
11/24/2011	6:37:29 PM	H2 MFC set to  0.000000
11/24/2011	6:37:29 PM	BCl3 MFC set to  0.000000
11/24/2011	6:37:29 PM	PHl3 MFC set to  0.000000
11/24/2011	6:37:29 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:37:29 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:37:29 PM	Tube furnace set to 0
11/24/2011	6:38:21 PM	Helium valve closed
11/24/2011	6:38:21 PM	H2 valve closed
11/24/2011	6:38:21 PM	BCl3 valve closed
11/24/2011	6:38:21 PM	PH3 valve closed
11/24/2011	6:38:21 PM	SiCl4 pre valve closed
11/24/2011	6:38:21 PM	SiCl4 post valve closed
11/24/2011	6:38:21 PM	Main Vac valve closed
11/24/2011	6:38:21 PM	Bubbler valve closed
11/24/2011	6:38:21 PM	Bypass valve opened
11/24/2011	6:38:21 PM	Helium MFC set to  0.000000
11/24/2011	6:38:21 PM	H2 MFC set to  0.000000
11/24/2011	6:38:21 PM	BCl3 MFC set to  0.000000
11/24/2011	6:38:21 PM	PHl3 MFC set to  0.000000
11/24/2011	6:38:21 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:38:21 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:38:21 PM	Tube furnace set to 0
11/24/2011	6:39:00 PM	Helium valve closed
11/24/2011	6:39:00 PM	H2 valve closed
11/24/2011	6:39:00 PM	BCl3 valve closed
11/24/2011	6:39:00 PM	PH3 valve closed
11/24/2011	6:39:00 PM	SiCl4 pre valve closed
11/24/2011	6:39:00 PM	SiCl4 post valve closed
11/24/2011	6:39:00 PM	Bypass valve closed
11/24/2011	6:39:00 PM	Bubbler valve closed
11/24/2011	6:39:00 PM	Main Vac valve opened
11/24/2011	6:39:00 PM	Helium MFC set to  0.000000
11/24/2011	6:39:00 PM	H2 MFC set to  0.000000
11/24/2011	6:39:00 PM	BCl3 MFC set to  0.000000
11/24/2011	6:39:00 PM	PHl3 MFC set to  0.000000
11/24/2011	6:39:00 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:39:00 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:39:00 PM	Tube furnace set to 0
11/24/2011	6:39:01 PM	Run finished at 6:39 PM
11/24/2011	6:39:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	6:49:20 PM	Main Vac valve closed
11/24/2011	6:49:41 PM	Main Vac valve opened
11/24/2011	6:50:53 PM	Recipe started at 6:50 PM
11/24/2011	6:50:53 PM	Helium valve closed
11/24/2011	6:50:53 PM	H2 valve closed
11/24/2011	6:50:53 PM	BCl3 valve closed
11/24/2011	6:50:53 PM	PH3 valve closed
11/24/2011	6:50:53 PM	SiCl4 pre valve closed
11/24/2011	6:50:53 PM	SiCl4 post valve closed
11/24/2011	6:50:53 PM	Main Vac valve closed
11/24/2011	6:50:53 PM	Bypass valve closed
11/24/2011	6:50:53 PM	Bubbler valve closed
11/24/2011	6:50:53 PM	Helium MFC set to  0.000000
11/24/2011	6:50:53 PM	H2 MFC set to  0.000000
11/24/2011	6:50:53 PM	BCl3 MFC set to  0.000000
11/24/2011	6:50:53 PM	PHl3 MFC set to  0.000000
11/24/2011	6:50:53 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:50:53 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:50:53 PM	Tube furnace set to 0
11/24/2011	6:50:56 PM	Helium valve closed
11/24/2011	6:50:56 PM	BCl3 valve closed
11/24/2011	6:50:56 PM	PH3 valve closed
11/24/2011	6:50:56 PM	SiCl4 pre valve closed
11/24/2011	6:50:56 PM	SiCl4 post valve closed
11/24/2011	6:50:56 PM	Main Vac valve closed
11/24/2011	6:50:56 PM	Bypass valve closed
11/24/2011	6:50:56 PM	Bubbler valve closed
11/24/2011	6:50:56 PM	H2 valve opened
11/24/2011	6:50:56 PM	Helium MFC set to  0.000000
11/24/2011	6:50:56 PM	H2 MFC set to  500.000000
11/24/2011	6:50:56 PM	BCl3 MFC set to  0.000000
11/24/2011	6:50:56 PM	PHl3 MFC set to  0.000000
11/24/2011	6:50:56 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:50:56 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:50:56 PM	Tube furnace set to 0
11/24/2011	6:52:05 PM	Helium valve closed
11/24/2011	6:52:05 PM	BCl3 valve closed
11/24/2011	6:52:05 PM	PH3 valve closed
11/24/2011	6:52:05 PM	SiCl4 pre valve closed
11/24/2011	6:52:05 PM	SiCl4 post valve closed
11/24/2011	6:52:05 PM	Main Vac valve closed
11/24/2011	6:52:05 PM	Bypass valve closed
11/24/2011	6:52:05 PM	H2 valve opened
11/24/2011	6:52:05 PM	Bubbler valve opened
11/24/2011	6:52:05 PM	Helium MFC set to  0.000000
11/24/2011	6:52:05 PM	H2 MFC set to  500.000000
11/24/2011	6:52:05 PM	BCl3 MFC set to  0.000000
11/24/2011	6:52:05 PM	PHl3 MFC set to  0.000000
11/24/2011	6:52:05 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:52:05 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:52:05 PM	Tube furnace set to 0
11/24/2011	6:52:06 PM	Helium valve closed
11/24/2011	6:52:06 PM	BCl3 valve closed
11/24/2011	6:52:06 PM	PH3 valve closed
11/24/2011	6:52:06 PM	SiCl4 pre valve closed
11/24/2011	6:52:06 PM	SiCl4 post valve closed
11/24/2011	6:52:06 PM	Main Vac valve closed
11/24/2011	6:52:06 PM	Bypass valve closed
11/24/2011	6:52:06 PM	H2 valve opened
11/24/2011	6:52:06 PM	Bubbler valve opened
11/24/2011	6:52:06 PM	Helium MFC set to  0.000000
11/24/2011	6:52:06 PM	H2 MFC set to  500.000000
11/24/2011	6:52:06 PM	BCl3 MFC set to  0.000000
11/24/2011	6:52:06 PM	PHl3 MFC set to  0.000000
11/24/2011	6:52:06 PM	SiCl4 MFC set to  0.000000
11/24/2011	6:52:06 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	6:52:06 PM	Tube furnace set to 1000
11/24/2011	7:15:06 PM	Helium valve closed
11/24/2011	7:15:06 PM	PH3 valve closed
11/24/2011	7:15:06 PM	Main Vac valve closed
11/24/2011	7:15:06 PM	Bypass valve closed
11/24/2011	7:15:06 PM	H2 valve opened
11/24/2011	7:15:06 PM	BCl3 valve opened
11/24/2011	7:15:06 PM	SiCl4 pre valve opened
11/24/2011	7:15:06 PM	SiCl4 post valve opened
11/24/2011	7:15:06 PM	Bubbler valve opened
11/24/2011	7:15:06 PM	Helium MFC set to  0.000000
11/24/2011	7:15:06 PM	H2 MFC set to  500.000000
11/24/2011	7:15:06 PM	BCl3 MFC set to  20.000000
11/24/2011	7:15:06 PM	PHl3 MFC set to  0.000000
11/24/2011	7:15:06 PM	SiCl4 MFC set to  42.000000
11/24/2011	7:15:06 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	7:15:06 PM	Tube furnace set to 1000
11/24/2011	7:18:06 PM	Helium valve closed
11/24/2011	7:18:06 PM	BCl3 valve closed
11/24/2011	7:18:06 PM	PH3 valve closed
11/24/2011	7:18:06 PM	SiCl4 pre valve closed
11/24/2011	7:18:06 PM	SiCl4 post valve closed
11/24/2011	7:18:06 PM	Main Vac valve closed
11/24/2011	7:18:06 PM	Bypass valve closed
11/24/2011	7:18:06 PM	H2 valve opened
11/24/2011	7:18:07 PM	Bubbler valve opened
11/24/2011	7:18:07 PM	Helium MFC set to  0.000000
11/24/2011	7:18:07 PM	H2 MFC set to  500.000000
11/24/2011	7:18:07 PM	BCl3 MFC set to  0.000000
11/24/2011	7:18:07 PM	PHl3 MFC set to  0.000000
11/24/2011	7:18:07 PM	SiCl4 MFC set to  0.000000
11/24/2011	7:18:07 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	7:18:07 PM	Tube furnace set to 1000
11/24/2011	7:20:07 PM	Helium valve closed
11/24/2011	7:20:07 PM	BCl3 valve closed
11/24/2011	7:20:07 PM	PH3 valve closed
11/24/2011	7:20:07 PM	Main Vac valve closed
11/24/2011	7:20:07 PM	Bypass valve closed
11/24/2011	7:20:07 PM	H2 valve opened
11/24/2011	7:20:07 PM	SiCl4 pre valve opened
11/24/2011	7:20:07 PM	SiCl4 post valve opened
11/24/2011	7:20:07 PM	Bubbler valve opened
11/24/2011	7:20:07 PM	Helium MFC set to  0.000000
11/24/2011	7:20:07 PM	H2 MFC set to  500.000000
11/24/2011	7:20:07 PM	BCl3 MFC set to  0.000000
11/24/2011	7:20:07 PM	PHl3 MFC set to  0.000000
11/24/2011	7:20:07 PM	SiCl4 MFC set to  42.000000
11/24/2011	7:20:07 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	7:20:07 PM	Tube furnace set to 1000
11/24/2011	7:37:07 PM	Helium valve closed
11/24/2011	7:37:07 PM	BCl3 valve closed
11/24/2011	7:37:07 PM	PH3 valve closed
11/24/2011	7:37:07 PM	SiCl4 pre valve closed
11/24/2011	7:37:07 PM	SiCl4 post valve closed
11/24/2011	7:37:07 PM	Main Vac valve closed
11/24/2011	7:37:07 PM	Bypass valve closed
11/24/2011	7:37:07 PM	H2 valve opened
11/24/2011	7:37:07 PM	Bubbler valve opened
11/24/2011	7:37:07 PM	Helium MFC set to  0.000000
11/24/2011	7:37:07 PM	H2 MFC set to  500.000000
11/24/2011	7:37:07 PM	BCl3 MFC set to  0.000000
11/24/2011	7:37:07 PM	PHl3 MFC set to  0.000000
11/24/2011	7:37:07 PM	SiCl4 MFC set to  0.000000
11/24/2011	7:37:07 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	7:37:07 PM	Tube furnace set to 950
11/24/2011	7:42:07 PM	Helium valve closed
11/24/2011	7:42:07 PM	BCl3 valve closed
11/24/2011	7:42:07 PM	PH3 valve closed
11/24/2011	7:42:07 PM	SiCl4 pre valve closed
11/24/2011	7:42:07 PM	SiCl4 post valve closed
11/24/2011	7:42:07 PM	Main Vac valve closed
11/24/2011	7:42:07 PM	Bypass valve closed
11/24/2011	7:42:07 PM	H2 valve opened
11/24/2011	7:42:07 PM	Bubbler valve opened
11/24/2011	7:42:07 PM	Helium MFC set to  0.000000
11/24/2011	7:42:07 PM	H2 MFC set to  500.000000
11/24/2011	7:42:07 PM	BCl3 MFC set to  0.000000
11/24/2011	7:42:07 PM	PHl3 MFC set to  0.000000
11/24/2011	7:42:07 PM	SiCl4 MFC set to  0.000000
11/24/2011	7:42:07 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	7:42:07 PM	Tube furnace set to 850
11/24/2011	7:47:07 PM	H2 valve closed
11/24/2011	7:47:07 PM	BCl3 valve closed
11/24/2011	7:47:07 PM	PH3 valve closed
11/24/2011	7:47:07 PM	SiCl4 pre valve closed
11/24/2011	7:47:07 PM	SiCl4 post valve closed
11/24/2011	7:47:07 PM	Main Vac valve closed
11/24/2011	7:47:07 PM	Bypass valve closed
11/24/2011	7:47:07 PM	Helium valve opened
11/24/2011	7:47:07 PM	Bubbler valve opened
11/24/2011	7:47:07 PM	Helium MFC set to  500.000000
11/24/2011	7:47:07 PM	H2 MFC set to  0.000000
11/24/2011	7:47:07 PM	BCl3 MFC set to  0.000000
11/24/2011	7:47:07 PM	PHl3 MFC set to  0.000000
11/24/2011	7:47:07 PM	SiCl4 MFC set to  0.000000
11/24/2011	7:47:07 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	7:47:07 PM	Tube furnace set to 0
11/24/2011	8:05:53 PM	Helium valve closed
11/24/2011	8:05:53 PM	H2 valve closed
11/24/2011	8:05:53 PM	BCl3 valve closed
11/24/2011	8:05:53 PM	PH3 valve closed
11/24/2011	8:05:53 PM	SiCl4 pre valve closed
11/24/2011	8:05:53 PM	SiCl4 post valve closed
11/24/2011	8:05:53 PM	Main Vac valve closed
11/24/2011	8:05:53 PM	Bypass valve closed
11/24/2011	8:05:53 PM	Bubbler valve closed
11/24/2011	8:05:53 PM	Helium MFC set to  0.000000
11/24/2011	8:05:53 PM	H2 MFC set to  0.000000
11/24/2011	8:05:53 PM	BCl3 MFC set to  0.000000
11/24/2011	8:05:53 PM	PHl3 MFC set to  0.000000
11/24/2011	8:05:53 PM	SiCl4 MFC set to  0.000000
11/24/2011	8:05:53 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	8:05:53 PM	Tube furnace set to 0
11/24/2011	8:05:54 PM	Run finished at 8:05 PM
11/24/2011	8:08:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/24/2011	8:08:02 PM	Recipe started at 8:08 PM
11/24/2011	8:08:02 PM	Helium valve closed
11/24/2011	8:08:02 PM	H2 valve closed
11/24/2011	8:08:02 PM	BCl3 valve closed
11/24/2011	8:08:02 PM	PH3 valve closed
11/24/2011	8:08:02 PM	SiCl4 pre valve closed
11/24/2011	8:08:02 PM	SiCl4 post valve closed
11/24/2011	8:08:02 PM	Main Vac valve closed
11/24/2011	8:08:02 PM	Bubbler valve closed
11/24/2011	8:08:02 PM	Bypass valve opened
11/24/2011	8:08:02 PM	Helium MFC set to  0.000000
11/24/2011	8:08:02 PM	H2 MFC set to  0.000000
11/24/2011	8:08:02 PM	BCl3 MFC set to  0.000000
11/24/2011	8:08:02 PM	PHl3 MFC set to  0.000000
11/24/2011	8:08:02 PM	SiCl4 MFC set to  0.000000
11/24/2011	8:08:02 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	8:08:02 PM	Tube furnace set to 0
11/24/2011	8:09:01 PM	Helium valve closed
11/24/2011	8:09:01 PM	H2 valve closed
11/24/2011	8:09:01 PM	BCl3 valve closed
11/24/2011	8:09:01 PM	PH3 valve closed
11/24/2011	8:09:01 PM	SiCl4 pre valve closed
11/24/2011	8:09:01 PM	SiCl4 post valve closed
11/24/2011	8:09:01 PM	Main Vac valve closed
11/24/2011	8:09:01 PM	Bubbler valve closed
11/24/2011	8:09:01 PM	Bypass valve opened
11/24/2011	8:09:01 PM	Helium MFC set to  0.000000
11/24/2011	8:09:01 PM	H2 MFC set to  0.000000
11/24/2011	8:09:01 PM	BCl3 MFC set to  0.000000
11/24/2011	8:09:01 PM	PHl3 MFC set to  0.000000
11/24/2011	8:09:01 PM	SiCl4 MFC set to  0.000000
11/24/2011	8:09:01 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	8:09:01 PM	Tube furnace set to 0
11/24/2011	8:10:01 PM	Helium valve closed
11/24/2011	8:10:01 PM	H2 valve closed
11/24/2011	8:10:01 PM	BCl3 valve closed
11/24/2011	8:10:01 PM	PH3 valve closed
11/24/2011	8:10:01 PM	SiCl4 pre valve closed
11/24/2011	8:10:01 PM	SiCl4 post valve closed
11/24/2011	8:10:01 PM	Bypass valve closed
11/24/2011	8:10:01 PM	Bubbler valve closed
11/24/2011	8:10:01 PM	Main Vac valve opened
11/24/2011	8:10:01 PM	Helium MFC set to  0.000000
11/24/2011	8:10:01 PM	H2 MFC set to  0.000000
11/24/2011	8:10:01 PM	BCl3 MFC set to  0.000000
11/24/2011	8:10:01 PM	PHl3 MFC set to  0.000000
11/24/2011	8:10:01 PM	SiCl4 MFC set to  0.000000
11/24/2011	8:10:01 PM	Bypass solenoid MFC set to  0.000000
11/24/2011	8:10:01 PM	Tube furnace set to 0
11/24/2011	8:10:02 PM	Run finished at 8:10 PM
11/24/2011	8:10:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
